Authors: Bachurin, VI Churilov, AB Potapov, EV Smirnov, VK Makarov, VV Danilin, AB

Citation: Vi. Bachurin et al., Formation of thin silicon nitride layers on Si by low energy N-2(+) ion bombardment, NUCL INST B, 147(1-4), 1999, pp. 316-319