Authors: Sturans, MA Hartley, JG Pfeiffer, HC Dhaliwal, RS Groves, TR Pavick, JW Quickle, RJ Clement, CS Dick, GJ Enichen, WA Gordon, MS Kendall, RA Kostek, CA Pinckney, DJ Robinson, CF Rockrohr, JD Safran, JM Senesi, JJ Tressler, EV

Citation: Ma. Sturans et al., EL5: One tool for advanced x-ray and chrome on glass mask making, J VAC SCI B, 16(6), 1998, pp. 3164-3167