Authors:
Olivier, M
Rochat, N
Chabli, A
Lefeuvre, G
Conne, F
Citation: M. Olivier et al., Multiple internal reflection spectroscopy: a sensitive non-destructive probe for interfaces and nanometric layers, MAT SC S PR, 4(1-3), 2001, pp. 15-18
Authors:
Rochat, N
Olivier, M
Chabli, A
Conne, F
Lefeuvre, G
Boll-Burdet, C
Citation: N. Rochat et al., Multiple internal reflection infrared spectroscopy using two-prism coupling geometry: A convenient way for quantitative study of organic contamination on silicon wafers, APPL PHYS L, 77(14), 2000, pp. 2249-2251
Authors:
Olivier, M
Martin, F
Chabli, A
Lefeuvre, G
Conne, F
Rochat, N
Citation: M. Olivier et al., Infrared study of hydrogen in ultra-thin silicon nitride films using multiple internal reflection spectroscopy (MIR) in 200 mm silicon wafers, PHYS ST S-A, 175(1), 1999, pp. 137-143