Authors: Kearns, DM Gillen, DR Voulot, D McCullough, RW Thompson, WR Cosimini, GJ Nelson, E Chow, PP Klaassen, J

Citation: Dm. Kearns et al., Study of the emission characteristics of a rf plasma source for atomic oxygen: Measurements of atom, ion, and electron fluxes, J VAC SCI A, 19(3), 2001, pp. 993-997

Authors: Voulot, D McCullough, RW Thompson, WR Burns, D Geddes, J Cosimini, GJ Nelson, E Chow, PP Klaassen, J

Citation: D. Voulot et al., Characterisation of an RF atomic nitrogen plasma source, J CRYST GR, 202, 1999, pp. 399-401