Authors: SMIRNOVA TP YAKOVKINA LV AMOSOV YI DANILOVICH OV

Citation: Tp. Smirnova et al., DOWNSTREAM PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION OF SINX-H FILMS FROM HEXAMETHYLCYCLOTRISILAZANE, Inorganic materials, 32(6), 1996, pp. 615-619