Authors:
LYNCH S
GREEF R
STOEMENOS J
DARTNELL NJ
LLOYD NS
KERN P
STUCK R
CREAN GM
Citation: S. Lynch et al., CHARACTERIZATION OF SEMIINSULATING POLYSILICON OXYGEN DOPED SILICON THIN-FILMS, Materials science and technology, 11(1), 1995, pp. 80-84
Authors:
GREEF R
GRAY DE
DARTNELL NJ
ZHU J
LYNCH S
CREAN GM
Citation: R. Greef et al., CHARACTERIZATION OF SILICON-ON-INSULATOR MULTILAYERS USING EX-SITU SPECTROSCOPIC ELLIPSOMETRY AND IN-SITU MONOCHROMATIC ELLIPSOMETRY DURINGPLASMA-ETCHING, Thin solid films, 233(1-2), 1993, pp. 214-217