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HIGH-DENSITY, INDUCTIVELY-COUPLED PLASMA ETCH OF SUB HALF-MICRON CRITICAL LAYERS - TRANSISTOR POLYSILICON GATE DEFINITION AND CONTACT FORMATION
Authors:
WESTERHEIM AC JONES RD MAGER PJ DUBASH JH DALTON TJ GOSS MW BAUM SK DASS SK
Citation:
Ac. Westerheim et al., HIGH-DENSITY, INDUCTIVELY-COUPLED PLASMA ETCH OF SUB HALF-MICRON CRITICAL LAYERS - TRANSISTOR POLYSILICON GATE DEFINITION AND CONTACT FORMATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(5), 1998, pp. 2699-2706
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