Authors: KUO CH BOONZAAYER M DEHERRERA M KYONG T ZHANG YH JOHS B HALE JS

Citation: Ch. Kuo et al., REAL-TIME IN-SITU COMPOSITION CONTROL OF INGAAS LATTICE-MATCHED TO INP BY AN 88-WAVELENGTH ELLIPSOMETER, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(3), 1998, pp. 1484-1488