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Results: 1-7 |
Results: 7
METASTABLE-ATOM-ACTIVATED GROWTH OF AN ULTRATHIN CARBONACEOUS RESIST FOR REACTIVE ION ETCHING OF SIO2 AND SI3N4
Authors: THYWISSEN JH JOHNSON KS DEKKER NH PRENTISS M WONG SS WEISS K GRUNZE M
Citation: Jh. Thywissen et al., METASTABLE-ATOM-ACTIVATED GROWTH OF AN ULTRATHIN CARBONACEOUS RESIST FOR REACTIVE ION ETCHING OF SIO2 AND SI3N4, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(3), 1998, pp. 1155-1160
LOCALIZATION OF METASTABLE ATOM BEAMS WITH OPTICAL STANDING WAVES - NANOLITHOGRAPHY AT THE HEISENBERG LIMIT
Authors: JOHNSON KS THYWISSEN JH DEKKER NH BERGGREN KK CHU AP YOUNKIN R PRENTISS M
Citation: Ks. Johnson et al., LOCALIZATION OF METASTABLE ATOM BEAMS WITH OPTICAL STANDING WAVES - NANOLITHOGRAPHY AT THE HEISENBERG LIMIT, Science, 280(5369), 1998, pp. 1583-1586
NANOFABRICATION USING NEUTRAL ATOMIC-BEAMS
Authors: THYWISSEN JH JOHNSON KS YOUNKIN R DEKKER NH BERGGREN KK CHU AP PRENTISS M LEE SA
Citation: Jh. Thywissen et al., NANOFABRICATION USING NEUTRAL ATOMIC-BEAMS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2093-2100
OBSERVATION OF THE GEOMETRIC AMPLITUDE FACTOR IN AN OPTICAL-SYSTEM
Authors: BOUWMEESTER D KARMAN GP DEKKER NH SCHRAMA CA WOERDMAN JP
Citation: D. Bouwmeester et al., OBSERVATION OF THE GEOMETRIC AMPLITUDE FACTOR IN AN OPTICAL-SYSTEM, J. mod. opt., 43(10), 1996, pp. 2087-2103
USING NEUTRAL METASTABLE ARGON ATOMS AND CONTAMINATION LITHOGRAPHY TOFORM NANOSTRUCTURES IN SILICON, SILICON DIOXIDE, AND GOLD
Authors: JOHNSON KS BERGGREN KK BLACK A BLACK CT CHU AP DEKKER NH RALPH DC THYWISSEN JH YOUNKIN R TINKHAM M PRENTISS M WHITESIDES GM
Citation: Ks. Johnson et al., USING NEUTRAL METASTABLE ARGON ATOMS AND CONTAMINATION LITHOGRAPHY TOFORM NANOSTRUCTURES IN SILICON, SILICON DIOXIDE, AND GOLD, Applied physics letters, 69(18), 1996, pp. 2773-2775
OBSERVATION OF LANDAU-ZENER DYNAMICS IN CLASSICAL OPTICAL-SYSTEMS
Authors: BOUWMEESTER D DEKKER NH VONDORSSELAER FE SCHRAMA CA VISSER PM WOERDMAN JP
Citation: D. Bouwmeester et al., OBSERVATION OF LANDAU-ZENER DYNAMICS IN CLASSICAL OPTICAL-SYSTEMS, Physical review. A, 51(1), 1995, pp. 646-654
LOW-DIMENSIONAL RESONANT-TUNNELING AND COULOMB-BLOCKADE - A COMPARISON OF FABRICATED VERSUS IMPURITY CONFINEMENT
Authors: DESHPANDE MR HORNBECK ES KOZODOY P DEKKER NH SLEIGHT JW REED MA FERNANDO CL FRENSLEY WR
Citation: Mr. Deshpande et al., LOW-DIMENSIONAL RESONANT-TUNNELING AND COULOMB-BLOCKADE - A COMPARISON OF FABRICATED VERSUS IMPURITY CONFINEMENT, Semiconductor science and technology, 9(11), 1994, pp. 1919-1924
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