Authors:
DECOSTER W
BRIJS B
DELEU J
ALAY J
VANDERVORST W
Citation: W. Decoster et al., IN-SITU OBSERVATION BY RBS OF OXYGEN GETTERING DURING CS SPUTTERING OF SI-BASED MATERIALS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 118(1-4), 1996, pp. 82-87
Authors:
BRIJS B
DELEU J
STORM W
DECOSTER W
VANDERVORST W
Citation: B. Brijs et al., STOICHIOMETRIC CHANGES OF SI, COSI2 AND TISI2 DURING LOW-ENERGY OXYGEN BOMBARDMENT IN COMBINATION WITH OXYGEN BLEED-IN, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 118(1-4), 1996, pp. 541-546
Authors:
DELEU J
BRIJS B
STORM W
VANDERVORST W
DECOSTER W
Citation: J. Deleu et al., THE BEHAVIOR OF SI AND COSI2 DURING LOW-ENERGY NITROGEN BOMBARDMENT, WITH AND WITHOUT O-2-FLOODING, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 113(1-4), 1996, pp. 534-538