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Results: 3
PATTERNED THICK PHOTORESIST LAYERS FOR PROTECTION OF PROTRUDING STRUCTURES DURING WET AND DRY-ETCHING PROCESSES
Authors: INDERMUHLE PF ROTH S DELLMANN L DEROOIJ NF
Citation: Pf. Indermuhle et al., PATTERNED THICK PHOTORESIST LAYERS FOR PROTECTION OF PROTRUDING STRUCTURES DURING WET AND DRY-ETCHING PROCESSES, Journal of micromechanics and microengineering, 8(2), 1998, pp. 74-76
2 STEPS MICROMOULDING AND PHOTOPOLYMER HIGH-ASPECT-RATIO STRUCTURING FOR APPLICATIONS IN PIEZOELECTRIC MOTOR COMPONENTS
Authors: DELLMANN L ROTH S BEURET C PARATTE L RACINE GA LORENZ H DESPONT M RENAUD P VETTIGER P DEROOIJ NF
Citation: L. Dellmann et al., 2 STEPS MICROMOULDING AND PHOTOPOLYMER HIGH-ASPECT-RATIO STRUCTURING FOR APPLICATIONS IN PIEZOELECTRIC MOTOR COMPONENTS, Microsystem technologies, 4(3), 1998, pp. 147-150
FABRICATION PROCESS OF HIGH-ASPECT-RATIO ELASTIC AND SU-8 STRUCTURES FOR PIEZOELECTRIC MOTOR APPLICATIONS
Authors: DELLMANN L ROTH S BEURET C RACINE GA LORENZ H DESPONT M RENAUD P VETTIGER P DEROOIJ NF
Citation: L. Dellmann et al., FABRICATION PROCESS OF HIGH-ASPECT-RATIO ELASTIC AND SU-8 STRUCTURES FOR PIEZOELECTRIC MOTOR APPLICATIONS, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 42-47
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