Authors: VOUTSAS AT HIBINO Y PETHE R DEMARAY E

Citation: At. Voutsas et al., STRUCTURE ENGINEERING FOR HILLOCK-FREE PURE ALUMINUM SPUTTER-DEPOSITION FOR GATE AND SOURCE LINE FABRICATION IN ACTIVE-MATRIX LIQUID-CRYSTAL DISPLAYS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(4), 1998, pp. 2668-2677

Authors: HOSOKAWA A DEMARAY E MULLAPUDI R INAGAWA M

Citation: A. Hosokawa et al., REAL-TIME SUBSTRATE MISALIGNMENT MONITOR AND AUTOMATIC RECALIBRATION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(3), 1998, pp. 1921-1925