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Authors: DENTINGER PM TAYLOR JW

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Authors: DENTINGER PM TAYLOR JW

Citation: Pm. Dentinger et Jw. Taylor, QUANTIFICATION OF THE EXTENT OF REACTION IN A NEGATIVE, NOVOLAC-BASED, CHEMICALLY AMPLIFIED RESIST, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2632-2638

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