Authors:
SPIGA S
TALLARIDA G
BORGHESI A
SASSELLA A
DESANTI G
Citation: S. Spiga et al., ANNEALING EFFECTS ON SILICON-RICH OXIDE-FILMS STUDIED BY SPECTROSCOPIC ELLIPSOMETRY, Thin solid films, 325(1-2), 1998, pp. 36-41
Authors:
BORGHESI A
GIARDINI ME
MARAZZI M
SASSELLA A
DESANTI G
Citation: A. Borghesi et al., ELLIPSOMETRIC CHARACTERIZATION OF AMORPHOUS AND POLYCRYSTALLINE SILICON FILMS DEPOSITED USING A SINGLE-WAFER REACTOR, Applied physics letters, 70(7), 1997, pp. 892-894