Authors: DEWA AS

Citation: As. Dewa, MESOSCOPIC SYSTEMS - BRIDGING FROM MICROMACHINED DEVICES TO MACROSCOPIC SYSTEMS, Mechatronics, 8(5), 1998, pp. 521-534

Authors: DENG K DEWA AS RITTER DC BONHAM C GUCKEL H

Citation: K. Deng et al., CHARACTERIZATION OF GEAR PUMPS FABRICATED BY LIGA, Microsystem technologies, 4(4), 1998, pp. 163-167

Authors: MANOHARA HM MALEK CK DEWA AS DENG K

Citation: Hm. Manohara et al., LOW Z-SUBSTRATE FOR COST-EFFECTIVE HIGH-ENERGY, STACKED EXPOSURES, Microsystem technologies, 4(1), 1997, pp. 17-20

Authors: ZORMAN CA FLEISCHMAN AJ DEWA AS MEHREGANY M JACOB C NISHINO S PIROUZ P

Citation: Ca. Zorman et al., EPITAXIAL-GROWTH OF 3C-SIC FILMS ON 4 INCH DIAM (100)SILICON-WAFERS BY ATMOSPHERIC-PRESSURE CHEMICAL-VAPOR-DEPOSITION, Journal of applied physics, 78(8), 1995, pp. 5136-5138

Authors: DENG K MEHREGANY M DEWA AS

Citation: K. Deng et al., A SIMPLE FABRICATION PROCESS FOR POLYSILICON SIDE-DRIVE MICROMOTORS, Journal of microelectromechanical systems, 3(4), 1994, pp. 126-133