Authors: DRAPER CW PEARCE CW GLICK JT GORDON M OLNESS GE BERNASEK SL

Citation: Cw. Draper et al., THE NATURE OF RESIDUES FOLLOWING THE ASHING OF ARSENIC IMPLANTED PHOTORESIST, Journal of materials research, 12(10), 1997, pp. 2799-2808

Authors: DICKINSON DA DRAPER CW SAMINATHAN M SOHN JE WILLIAMS G

Citation: Da. Dickinson et al., GREEN PRODUCT MANUFACTURING, AT&T technical journal, 74(6), 1995, pp. 26-35