Authors: MOSHKALYOV SA MACHIDA M CAMPOS DO DULKIN A

Citation: Sa. Moshkalyov et al., SPATIALLY-RESOLVED OPTICAL-EMISSION STUDY OF SPUTTERING IN REACTIVE PLASMAS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(2), 1998, pp. 514-523

Authors: MOSHKALYOV S MACHIDA M CAMPOS D DULKIN A

Citation: S. Moshkalyov et al., SECONDARY PHOTON-EMISSION IN PLASMA PROCESSING, Applied physics letters, 70(18), 1997, pp. 2478-2480