Authors: WANG YL WU J LIU CW WANG TC DUN JW

Citation: Yl. Wang et al., MATERIAL CHARACTERISTICS AND CHEMICAL-MECHANICAL POLISHING OF ALUMINUM-ALLOY THIN-FILMS, Thin solid films, 332(1-2), 1998, pp. 397-403

Authors: WANG YL LIU C FENG MS DUN JW CHOU KS

Citation: Yl. Wang et al., EFFECTS OF UNDERLYING FILMS ON THE CHEMICAL-MECHANICAL POLISHING FOR SHALLOW TRENCH ISOLATION TECHNOLOGY, Thin solid films, 308, 1997, pp. 543-549