Authors:
BARTH R
HAMIDI AH
HADAM B
HOLLKOTT J
DUNKMANN D
AUGE J
KURZ H
Citation: R. Barth et al., ELECTRON-BEAM LITHOGRAPHY AND ION-IMPLANTATION TECHNIQUES FOR FABRICATION OF HIGH-T-C JOSEPHSON-JUNCTIONS, Microelectronic engineering, 30(1-4), 1996, pp. 407-410