Authors:
DYMOVA NN
KUNITSYN AE
CHALDYSHEV VV
MARKOV AV
Citation: Nn. Dymova et al., SILICON AND PHOSPHORUS COIMPLANTATION INTO UNDOPED AND INDIUM-DOPED GAAS SUBSTRATES, Semiconductors, 31(12), 1997, pp. 1217-1220
Authors:
CHALDYSHEV VV
DYMOVA NN
KUNITSYN AE
MARKOV AV
Citation: Vv. Chaldyshev et al., FORMATION OF N(-LAYERS IN UNDOPED AND INDIUM-DOPED GAAS WAFERS BY SI AND SI+P ION-IMPLANTATION()), Physica status solidi. a, Applied research, 163(1), 1997, pp. 81-86