Authors:
Etrillard, J
Bresse, JF
Daguet, C
Riet, M
Mba, J
Citation: J. Etrillard et al., Low damage dry etching of III-V materials for heterojunction bipolar transistor applications using a chlorinated inductively coupled plasma, J VAC SCI A, 17(4), 1999, pp. 1174-1181