Authors:
Franquet, A
De Laet, J
Schram, T
Terryn, H
Subramanian, V
van Ooij, WJ
Vereecken, J
Citation: A. Franquet et al., Determination of the thickness of thin silane films on aluminium surfaces by means of spectroscopic ellipsometry, THIN SOL FI, 384(1), 2001, pp. 37-45