Authors:
Debal, F
Bretagne, J
Dauchot, JP
Hecq, M
Wautelet, M
Citation: F. Debal et al., On the role of plasma-surface interactions in dc magnetron discharges in Ar-N-2 gas mixtures, PLASMA SOUR, 10(1), 2001, pp. 30-37
Authors:
Debal, F
Wautelet, M
Bretagne, J
Dauchot, JP
Hecq, M
Citation: F. Debal et al., Spatially-resolved spectroscopic optical emission of dc-magnetron sputtering discharges in argon-nitrogen gas mixtures, PLASMA SOUR, 9(2), 2000, pp. 152-160
Citation: F. Debal et al., Spectroscopic optical emission tomography of direct-current magnetron sputtering discharges in argon-nitrogen gas mixtures, SURF COAT, 119, 1999, pp. 927-932