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Results:
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Results: 1
Substrate heater for the growth of epitaxial silicon films
Authors:
Deming, M Varhue, W Adams, E Lavoie, M
Citation:
M. Deming et al., Substrate heater for the growth of epitaxial silicon films, REV SCI INS, 70(3), 1999, pp. 1821-1823
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