Authors:
Zambov, LM
Ivanov, B
Popov, C
Georgiev, G
Stoyanov, I
Dimitrov, DB
Citation: Lm. Zambov et al., Characterization of low-dielectric constant SiOCN films synthesized by lowpressure chemical vapour deposition, J PHYS IV, 11(PR3), 2001, pp. 1005-1012
Authors:
Petrov, P
Dimitrov, DB
Krastev, V
Georgiev, C
Popov, C
Citation: P. Petrov et al., X-ray photoelectron spectroscopy characterization of CNx thin films deposited by electron beam evaporation and nitrogen ion bombardment, DIAM RELAT, 9(3-6), 2000, pp. 562-565
Citation: Db. Dimitrov et al., Influence of vacuum rapid thermal annealing on the properties of mu PCVD SiO2 and SiO2 center dot P2O5 films, VACUUM, 58(2-3), 2000, pp. 485-489