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Results: 1-4 |
Results: 4

Authors: Dimitrova, T Arshak, K Atanassova, E
Citation: T. Dimitrova et al., Crystallization effects in oxygen annealed Ta2O5 thin films on Si, THIN SOL FI, 381(1), 2001, pp. 31-38

Authors: Paskaleva, A Atanassova, E Dimitrova, T
Citation: A. Paskaleva et al., Leakage currents and conduction mechanisms of Ta2O5 layers on Si obtained by RF sputtering, VACUUM, 58(2-3), 2000, pp. 470-477

Authors: Beshkov, G Dimitrov, DB Velchev, N Petrov, P Ivanov, B Zambov, L Dimitrova, T
Citation: G. Beshkov et al., Effect of vacuum rapid thermal annealing on the properties of SiNx films, VACUUM, 58(2-3), 2000, pp. 509-515

Authors: Novkovski, N Pecovska-Gjorgjevich, M Atanassova, E Dimitrova, T
Citation: N. Novkovski et al., Stress degradation of low field leakage in alumina gate MOS structures containing RF magnetron sputtered thin Ta2O5 films on silicon, PHYS ST S-A, 172(2), 1999, pp. R9-R10
Risultati: 1-4 |