Authors: Iggulden, R Clevenger, L Costrini, G Dobuzinsky, D Filippi, R Gambino, J Lin, CT Schnabel, F Weber, S Gignac, L Ronay, M

Citation: R. Iggulden et al., Dual damascene aluminum for 1-Gbit DRAMs, SOL ST TECH, 41(11), 1998, pp. 37