Authors: van Mol, AMB Driessen, JPAM Linden, JL de Croon, MHJM Spee, CIMA Schouten, JC

Citation: Amb. Van Mol et al., Vapor pressures of precursors for the CVD of titanium nitride and tin oxide, CHEM VAPOR, 7(3), 2001, pp. 101-104

Authors: Driessen, JPAM Schoonman, J Jensen, KF

Citation: Jpam. Driessen et al., Infrared spectroscopic study of decomposition of Ti(N(CH3)(2))(4), J ELCHEM SO, 148(3), 2001, pp. G178-G184

Authors: Driessen, JPAM Kuypers, AD Schoonman, J

Citation: Jpam. Driessen et al., Gas-phase chemistry in up-scaled plasma enhanced metal-organic chemical-vapor deposition of TiN and Ti(C,N) on tool steel, J VAC SCI A, 18(4), 2000, pp. 1971-1976

Authors: Driessen, JPAM Kuypers, AD Schoonman, J

Citation: Jpam. Driessen et al., Optimisation of the MOCVD of Ti(C, N) in a pulsed H-2-N-2 plasma by gas-phase analysis, J PHYS IV, 9(P8), 1999, pp. 605-612

Authors: Driessen, JPAM Kuypers, AD Schoonman, J

Citation: Jpam. Driessen et al., A mass-spectroscopical study of the decomposition of Ti(NMe2)(4) in a mixed Ar-H-2-N-2 pulsed dc plasma, SURF COAT, 110(3), 1998, pp. 173-183