Authors:
Thomas, L
Maille, L
Badie, JM
Ducarroir, M
Citation: L. Thomas et al., Microwave plasma chemical vapour deposition of tetramethylsilane: correlations between optical emission spectroscopy and film characteristics, SURF COAT, 142, 2001, pp. 314-320
Authors:
Thomas, L
Ducarroir, M
Hillel, R
Berjoan, R
Citation: L. Thomas et al., Ion bombardment and temperature effects on the microstructure of RF plasmachemical vapor-deposited SiC : H, SURF COAT, 142, 2001, pp. 829-834