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Results: 1
Effect of a bell-shaped cover in spin coating process on final film thickness
Authors:
Pannek, M Dunkel, T Schubert, DW
Citation:
M. Pannek et al., Effect of a bell-shaped cover in spin coating process on final film thickness, MAT RES INN, 4(5-6), 2001, pp. 340-343
Risultati:
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