Authors: EBEFORS T KALVESTEN E STEMME G

Citation: T. Ebefors et al., NEW SMALL RADIUS JOINTS BASED ON THERMAL SHRINKAGE OF POLYIMIDE IN V-GROOVES FOR ROBUST SELF-ASSEMBLY 3D MICROSTRUCTURES, Journal of micromechanics and microengineering, 8(3), 1998, pp. 188-194

Authors: EBEFORS T KALVESTEN E STEMME G

Citation: T. Ebefors et al., DYNAMIC ACTUATION OF POLYIMIDE V-GROOVE JOINTS BY ELECTRICAL HEATING, Sensors and actuators. A, Physical, 67(1-3), 1998, pp. 199-204