Authors: MARRA DC EDELBERG EA NAONE RL AYDIL ES

Citation: Dc. Marra et al., SILICON HYDRIDE COMPOSITION OF PLASMA-DEPOSITED HYDROGENATED AMORPHOUS AND NANOCRYSTALLINE SILICON FILMS AND SURFACES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(6), 1998, pp. 3199-3210

Authors: MARRA DC EDELBERG EA NAONE RL AYDIL ES

Citation: Dc. Marra et al., EFFECT OF H-2 DILUTION ON THE SURFACE-COMPOSITION OF PLASMA-DEPOSITEDSILICON FILMS FROM SIH4, Applied surface science, 133(1-2), 1998, pp. 148-151