Citation: Ar. Ellingboe et Rw. Boswell, CAPACITIVE, INDUCTIVE AND HELICON-WAVE MODES OF OPERATION OF A HELICON PLASMA SOURCE, Physics of plasmas, 3(7), 1996, pp. 2797-2804
Authors:
MOLVIK AW
ROGNLIEN TD
BYERS JA
COHEN RH
ELLINGBOE AR
HOOPER EB
MCLEAN HS
STALLARD BW
VITELLO PA
Citation: Aw. Molvik et al., EXPERIMENTS AND MODELING OF A HELICON SOURCE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(3), 1996, pp. 984-989