EXPERIMENTS AND MODELING OF A HELICON SOURCE

Citation
Aw. Molvik et al., EXPERIMENTS AND MODELING OF A HELICON SOURCE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(3), 1996, pp. 984-989
Citations number
14
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
ISSN journal
07342101
Volume
14
Issue
3
Year of publication
1996
Part
1
Pages
984 - 989
Database
ISI
SICI code
0734-2101(1996)14:3<984:EAMOAH>2.0.ZU;2-G
Abstract
We report on experimental results from the Lawrence Livermore National Laboratory Helicon Source plasma source and numerical models used to understand the observations. These include measurements of plasma dens ity with Langmuir probes, and heating measurements with an electron en ergy analyzer to test transit-time heating. The models describe helico n wave excitation, and electron heating. The wave fields are calculate d using the ANTENA code including collisional and electron Landau heat ing. Numerical and analytic models are used to describe transit-time h eating of electrons and quantify the effect of collisions. (C) 1996 Am erican Vacuum Society.