Aw. Molvik et al., EXPERIMENTS AND MODELING OF A HELICON SOURCE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(3), 1996, pp. 984-989
Citations number
14
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
We report on experimental results from the Lawrence Livermore National
Laboratory Helicon Source plasma source and numerical models used to
understand the observations. These include measurements of plasma dens
ity with Langmuir probes, and heating measurements with an electron en
ergy analyzer to test transit-time heating. The models describe helico
n wave excitation, and electron heating. The wave fields are calculate
d using the ANTENA code including collisional and electron Landau heat
ing. Numerical and analytic models are used to describe transit-time h
eating of electrons and quantify the effect of collisions. (C) 1996 Am
erican Vacuum Society.