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Results: 3
200 EV 10 KEV BORON IMPLANTATION AND RAPID THERMAL ANNEALING - SECONDARY-ION MASS-SPECTROSCOPY AND TRANSMISSION ELECTRON-MICROSCOPY STUDY
Authors: CURRENT MI LOPES D FOAD MA ENGLAND JG JONES C SU D
Citation: Mi. Current et al., 200 EV 10 KEV BORON IMPLANTATION AND RAPID THERMAL ANNEALING - SECONDARY-ION MASS-SPECTROSCOPY AND TRANSMISSION ELECTRON-MICROSCOPY STUDY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(1), 1998, pp. 327-333
CHARGED-PARTICLE ENERGY SPECTROMETERS AND THEIR APPLICATIONS IN FUNDAMENTAL-STUDIES OF WAFER CHARGING AND ION-BEAM TUNING PHENOMENA
Authors: ENGLAND JG COOK CEA ARMOUR DG FOAD MA
Citation: Jg. England et al., CHARGED-PARTICLE ENERGY SPECTROMETERS AND THEIR APPLICATIONS IN FUNDAMENTAL-STUDIES OF WAFER CHARGING AND ION-BEAM TUNING PHENOMENA, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 96(1-2), 1995, pp. 39-42
STUDIES OF WAFER SURFACE CHARGING USING THE THOR MONITOR DEVICE
Authors: MALONE P SHULL W ENGLAND JG FOTHERINGHAM I
Citation: P. Malone et al., STUDIES OF WAFER SURFACE CHARGING USING THE THOR MONITOR DEVICE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 96(1-2), 1995, pp. 52-55
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