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Results:
1-7
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Results: 7
Authors:
ERICSON F
GREEK S
SODERKVIST J
SCHWEITZ JA
Citation: F. Ericson et al., HIGH-SENSITIVITY SURFACE MICROMACHINED STRUCTURES FOR INTERNAL-STRESSAND STRESS GRADIENT EVALUATION, Journal of micromechanics and microengineering, 7(1), 1997, pp. 30-36
Authors:
GREEK S
ERICSON F
JOHANSSON S
SCHWEITZ JA
Citation: S. Greek et al., IN-SITU TENSILE-STRENGTH MEASUREMENT AND WEIBULL ANALYSIS OF THICK-FILM AND THIN-FILM MICROMACHINED POLYSILICON STRUCTURES, Thin solid films, 292(1-2), 1997, pp. 247-254
Authors:
LANGE P
KIRSTEN M
RIETHMULLER W
WENK B
ZWICKER G
MORANTE JR
ERICSON F
SCHWEITZ JA
Citation: P. Lange et al., THICK POLYCRYSTALLINE SILICON FOR SURFACE-MICROMECHANICAL APPLICATIONS - DEPOSITION, STRUCTURING AND MECHANICAL CHARACTERIZATION, Sensors and actuators. A, Physical, 54(1-3), 1996, pp. 674-678
Authors:
KIRSTEN M
WENK B
ERICSON F
SCHWEITZ JA
RIETHMULLER W
LANGE P
Citation: M. Kirsten et al., DEPOSITION OF THICK DOPED POLYSILICON FILMS WITH LOW-STRESS IN AN EPITAXIAL REACTOR FOR SURFACE MICROMACHINING APPLICATIONS, Thin solid films, 259(2), 1995, pp. 181-187
Authors:
HJORT K
ERICSON F
SCHWEITZ JA
HALLIN C
JANZEN E
Citation: K. Hjort et al., HARDNESS, INTERNAL-STRESS AND FRACTURE-TOUGHNESS OF EPITAXIAL ALXGA1-XAS FILMS, Thin solid films, 250(1-2), 1994, pp. 157-163
Authors:
ERICSON F
HJORT K
SCHWEITZ JA
ANDERSSON S
JANZEN E
Citation: F. Ericson et al., MICRO-SCRIBES IN SEMIINSULATING GAAS STUDIED BY CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY, Journal of crystal growth, 143(1-2), 1994, pp. 22-28
Authors:
HJORT K
ERICSON F
SCHWEITZ JA
HALLIN C
JANZEN E
Citation: K. Hjort et al., GAAS LOW-TEMPERATURE FUSION BONDING, Journal of the Electrochemical Society, 141(11), 1994, pp. 3242-3245
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1-7
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