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Results: 1-3 |
Results: 3
SILICON DRY-ETCHING IN HYDROGEN IODIDE PLASMAS - SURFACE DIAGNOSTICS AND TECHNOLOGICAL APPLICATIONS
Authors: RICHTER HH AMINPUR MA ERZGRABER HB WOLFF A KRUGER D DEHOFF A REETZ M
Citation: Hh. Richter et al., SILICON DRY-ETCHING IN HYDROGEN IODIDE PLASMAS - SURFACE DIAGNOSTICS AND TECHNOLOGICAL APPLICATIONS, JPN J A P 1, 36(7B), 1997, pp. 4849-4853
QUANTITATIVE STUDY OF ISOELECTRONIC COPPER PAIRS BY PHOTOLUMINESCENCEAND DEEP-LEVEL TRANSIENT SPECTROSCOPY
Authors: ERZGRABER HB SCHMALZ K
Citation: Hb. Erzgraber et K. Schmalz, QUANTITATIVE STUDY OF ISOELECTRONIC COPPER PAIRS BY PHOTOLUMINESCENCEAND DEEP-LEVEL TRANSIENT SPECTROSCOPY, Materials science and technology, 11(7), 1995, pp. 676-679
CORRELATION BETWEEN THE CU-RELATED LUMINESCENT CENTER AND A DEEP-LEVEL IN SILICON
Authors: ERZGRABER HB SCHMALZ K
Citation: Hb. Erzgraber et K. Schmalz, CORRELATION BETWEEN THE CU-RELATED LUMINESCENT CENTER AND A DEEP-LEVEL IN SILICON, Journal of applied physics, 78(6), 1995, pp. 4066-4068
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