Citation: A. Essafti et al., PREPARATION OF SI-N-B FILMS BY CVD TECHNIQUES - EFFECT OF SIH4 ADDITION TO B2H6 AND NH3 GAS-MIXTURES, DIAMOND AND RELATED MATERIALS, 5(3-5), 1996, pp. 580-583
Authors:
ESSAFTI A
GOMEZALEIXANDRE C
FIERRO JLG
FERNANDEZ M
ALBELLA JM
Citation: A. Essafti et al., CHEMICAL-VAPOR-DEPOSITION SYNTHESIS AND CHARACTERIZATION OF CO-DEPOSITED SILICON-NITROGEN-BORON MATERIALS, Journal of materials research, 11(10), 1996, pp. 2565-2574
Authors:
GOMEZALEIXANDRE C
ESSAFTI A
FERNANDEZ M
FIERRO JLG
ALBELLA JM
Citation: C. Gomezaleixandre et al., INFLUENCE OF DIBORANE FLOW RATE ON THE STRUCTURE AND STABILITY OF CVDBORON-NITRIDE FILMS, Journal of physical chemistry, 100(6), 1996, pp. 2148-2153