Authors: ETTOUHAMI A ESSAID A OUAKRIM N MICHEL L LIMOURI M

Citation: A. Ettouhami et al., THERMAL DRIFTS OF MICROELECTRONIC CAPACIT IVE PRESSURE SENSOR, Journal de physique. III, 7(7), 1997, pp. 1537-1548

Authors: ETTOUHAMI A ESSAID A OUAKRIM N MICHEL L LIMOURI M

Citation: A. Ettouhami et al., THERMAL BUCKLING OF SILICON CAPACITIVE PRESSURE SENSOR, Sensors and actuators. A, Physical, 57(3), 1996, pp. 167-171