Citation: D. Eichner et al., Measurements on micromachined silicon accelerometers with piezoelectric sensor action, SENS ACTU-A, 76(1-3), 1999, pp. 247-252
Authors:
Kirby, PB
Wright, RV
Gaucher, P
Galtier, P
Kofoed, L
Gullov, JO
Von Munch, W
Eichner, D
Ploss, B
Kruger, JK
Citation: Pb. Kirby et al., Report on Brite-EuRam project sensors and mechatronic devices using ferroelectric thin films SEMDEFT, J PHYS IV, 8(P9), 1998, pp. 161-169