Authors:
Ruchhoeft, P
Colburn, M
Choi, B
Nounu, H
Johnson, S
Bailey, T
Damle, S
Stewart, M
Ekerdt, J
Sreenivasan, SV
Wolfe, JC
Willson, CG
Citation: P. Ruchhoeft et al., Patterning curved surfaces: Template generation by ion beam proximity lithography and relief transfer by step and flash imprint lithography, J VAC SCI B, 17(6), 1999, pp. 2965-2969
Authors:
John, S
Quinones, EJ
Ferguson, B
Ray, SK
Anantharam, B
Middlebrooks, S
Mullins, CB
Ekerdt, J
Rawlings, J
Banerjee, SK
Citation: S. John et al., Properties of Si1-x-yGexCy epitaxial films grown by ultrahigh vacuum chemical vapor deposition, J ELCHEM SO, 146(12), 1999, pp. 4611-4618