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Authors: Frenning, G Engelmark, F Niklasson, GA Stromme, M

Citation: G. Frenning et al., Li conduction in sputtered amorphous Ta2O5, J ELCHEM SO, 148(5), 2001, pp. A418-A421

Authors: Jonsson, LB Westlinder, J Engelmark, F Hedlund, C Du, J Smith, U Blom, HO

Citation: Lb. Jonsson et al., Patterning of tantalum pentoxide, a high epsilon material, by inductively coupled plasma etching, J VAC SCI B, 18(4), 2000, pp. 1906-1910

Authors: Engelmark, F Fucntes, G Katardjiev, IV Harsta, A Smith, U Berg, S

Citation: F. Engelmark et al., Synthesis of highly oriented piezoelectric AlN films by reactive sputter deposition, J VAC SCI A, 18(4), 2000, pp. 1609-1612