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Leysen, JE
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Authors:
Moerkerke, R
Berghmans, H
Vandeweerdt, P
Adriaensen, P
Ercken, M
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Gelan, J
Citation: R. Moerkerke et al., Phase behaviour and solvent diffusion in the system poly(methyl methacrylate)/methanol, MACRO CH P, 201(3), 2000, pp. 308-312
Authors:
Ercken, M
Moelants, M
Vandenberghe, G
Goethals, M
Ronse, K
Masuda, S
Spiess, W
Pawlowski, G
Citation: M. Ercken et al., Optimization of an advanced positive tone DUV photoresist towards 150 nm and beyond, MICROEL ENG, 53(1-4), 2000, pp. 443-447