Citation: T. Sugino et al., Synthesis of boron nitride film with low dielectric constant for its application to silicon ultralarge scale integrated semiconductors, DIAM RELAT, 10(3-7), 2001, pp. 1375-1379
Authors:
Nesladek, M
Vanecek, M
Meykens, K
Haenen, K
Manca, J
De Schepper, L
Pace, E
Pini, A
Rinati, GV
Kimura, C
Etou, Y
Sugino, T
Citation: M. Nesladek et al., Study of UV and subgap photocurrent response in diamond and BCN thin filmsfor detector applications, PHYS ST S-A, 185(1), 2001, pp. 107-113