Authors: Cresswell, MW Bonevich, JE Allen, RA Guillaume, NMP Giannuzzi, LA Everist, SC Murabito, CE Shea, PJ Linholm, LW

Citation: Mw. Cresswell et al., Electrical linewidth test structures patterned in (100) silicon-on-insulator for use as CD standards, IEEE SEMIC, 14(4), 2001, pp. 356-364

Authors: Allen, RA Headley, TJ Everist, SC Ghoshtagore, RN Cresswell, MW Linholm, LW

Citation: Ra. Allen et al., High-resolution transmission electron microscopy calibration of critical dimension (CD) reference materials, IEEE SEMIC, 14(1), 2001, pp. 26-31