Citation: Gk. Fedder et Rt. Howe, MULTIMODE DIGITAL-CONTROL OF A SUSPENDED POLYSILICON MICROSTRUCTURE, Journal of microelectromechanical systems, 5(4), 1996, pp. 283-297
Authors:
FEDDER GK
SANTHANAM S
REED ML
EAGLE SC
GUILLOU DF
LU MSC
CARLEY LR
Citation: Gk. Fedder et al., LAMINATED HIGH-ASPECT-RATIO MICROSTRUCTURES IN A CONVENTIONAL CMOS PROCESS, Sensors and actuators. A, Physical, 57(2), 1996, pp. 103-110