Citation: Cp. Fictorie et al., KINETIC AND MECHANISTIC STUDY OF THE CHEMICAL-VAPOR-DEPOSITION OF TITANIUM-DIOXIDE THIN-FILMS USING TETRAKIS-(ISOPROPOXO)-TITANIUM(IV), Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(4), 1994, pp. 1108-1113
Authors:
CHEN S
MASON MG
GYSLING HJ
PAZPUJALT GR
BLANTON TN
CASTRO T
CHEN KM
FICTORIE CP
GLADFELTER WL
FRANCIOSI A
COHEN PI
EVANS JF
Citation: S. Chen et al., ULTRAHIGH-VACUUM METALORGANIC CHEMICAL-VAPOR-DEPOSITION GROWTH AND IN-SITU CHARACTERIZATION OF EPITAXIAL TIO2 FILMS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 11(5), 1993, pp. 2419-2429