Authors: ALVES MAR BRAGA ED FISSORE A CESCATO L

Citation: Mar. Alves et al., OPTICAL-EMISSION END-POINT DETECTING FOR MONITORING OXYGEN PLASMA A-C-H STRIPPING, Vacuum, 49(3), 1998, pp. 213-215

Authors: FISSORE A ALVES MAR BRAGA ED CESCATO L

Citation: A. Fissore et al., SELECTIVE-AREA DEPOSITION OF A-C-H FILMS AS MASKS FOR ANISOTROPIC ETCHING OF CRYSTALLINE SILICON IN AQUEOUS POTASSIUM HYDROXIDE, Vacuum, 49(1), 1998, pp. 49-50