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Results: 2
OPTICAL-EMISSION END-POINT DETECTING FOR MONITORING OXYGEN PLASMA A-C-H STRIPPING
Authors:
ALVES MAR BRAGA ED FISSORE A CESCATO L
Citation:
Mar. Alves et al., OPTICAL-EMISSION END-POINT DETECTING FOR MONITORING OXYGEN PLASMA A-C-H STRIPPING, Vacuum, 49(3), 1998, pp. 213-215
SELECTIVE-AREA DEPOSITION OF A-C-H FILMS AS MASKS FOR ANISOTROPIC ETCHING OF CRYSTALLINE SILICON IN AQUEOUS POTASSIUM HYDROXIDE
Authors:
FISSORE A ALVES MAR BRAGA ED CESCATO L
Citation:
A. Fissore et al., SELECTIVE-AREA DEPOSITION OF A-C-H FILMS AS MASKS FOR ANISOTROPIC ETCHING OF CRYSTALLINE SILICON IN AQUEOUS POTASSIUM HYDROXIDE, Vacuum, 49(1), 1998, pp. 49-50
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