Authors:
CHANELIERE C
FOUR S
AUTRAN JL
DEVINE RAB
SANDLER NP
Citation: C. Chaneliere et al., PROPERTIES OF AMORPHOUS AND CRYSTALLINE TA2O5 THIN-FILMS DEPOSITED ONSI FROM A TA(OC2H5)(5) PRECURSOR, Journal of applied physics, 83(9), 1998, pp. 4823-4829